This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry.

The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution,...

Electrodeposition allows the -tailoring- of surface properties of a bulk material or, in the case of electroforming, the entire part. Deposits can be produced to meet a variety of designer demands. For this reason and for the possibilities that exist in terms of -new materials- for a variety of applications, a thorough understanding of the materials science of electrodeposition is of utmost importance. This book provides that understanding.

Although supercritial fluid (SCF) technology is now widely used in extraction and purification processes (in the petrochemical, food and pharmaceuticals industries), this book is the first to address the new application of cleaning. The objective is to provide a roadmap for readers who want to know whether SCF technology can meet their own processing and cleaning needs. It is particularly helpful to those striving to balance the requirements for a clean product and a clean environment. The interdisciplinary subject matter will appeal to scientists and engineers in all specialties ranging from...

2nd Edition. The almost exponential increase in density, complexity, and performance of integrated circuits over the past ten years (for example, ASIC (Application Specific Integrated Circuit), VHSIC (Very High Speed IC), VLSIC (Very Large Scale IC), and ULSIC (Ultra Large Scale IC) have driven developments in the interconnect substrates culminating in what is now known as multichip modules (MCM). However, the fundamental of design, fabrication, and testing of MCM's are essentially the same as hybrid microcircuits. In the authors' opinion MCM's are extensions of hybrid circuits that can...

Reviews the chemical vapor deposition (CVD) process and its many applications for coatings, powders, fibers, and monolithic components. Individual chapters discuss the CVD of metals, allotropes of carbon, non-metallic elements, and ceramic materials. The second edition updates coverage of plasma CVD

This is the first book to encompass the fundamental phenomenon, principles, and processes of discrete droplets of both normal liquids and melts. It provides the reader with the science and engineering of discrete droplets, and provides researchers, scientists and engineers with the latest developments in the field. The book begins with a systematic review of various processes and techniques, along with their applications and associations with materials systems. This is followed by a description of the phenomena and principles in droplet processes. Correlations, calculations, and numerical...

The first available textual reference to treat the manufacture and use of high temperature/high power family semiconductors, this book details the growth, processing and device applications for the wide gap semiconductor technology. Covers new applications in high temperature/high power electronics for power switching avionics and defense short wavelength emitters.

This is the first single-volume handbook with the information a researcher needs to select the best rheology modifiers for his/her project. Information on 20 different types of rheology modifiers manufactured by 26 companies worldwide is described. These range from Acrylic Polymers to Xanthan Gum. This handbook was written because, in the authors' experience, the selection of a rheology modifier for specific applications is an arduous task. It requires researching the technical literature of numerous suppliers, contacting them for current information and recommendations, and paring the list...

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition.
This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers...

Perfect for the new technician or engineer entering the ceramics industry as well as for the ""old hand"" who needs an update on some aspect of ceramics processing, this resource provides practical laboratory-oriented answers to such typical processing problems as particle segregation, agglomeration, contamination, pressure gradients, adherence to tooling, and temperature gradients during drying and firing.

The author examines the difficulties of practical testing and processing in the ceramic laboratory, such as vast differences in scale and equipment, and shows how to evaluate results...