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Modeling and Control of Precision Actuators explores new technologies that can ultimately be applied in a myriad of industries. It covers dynamical analysis of precise actuators and strategies of design for various control applications. The book addresses four main schemes: modeling and control of precise actuators; nonlinear control of precise actuators, including sliding mode control and neural network feedback control; fault detection and fault-tolerant control; and advanced air bearing control. It covers application issues in the modeling and control of precise...

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 10⁵, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes.

Precision Motion Control (second edition) focuses on enabling technologies for precision engineering...