Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old. Since then a lot of new and important work has been performed and published in international journals. The book gives an overview on all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all researchers who need sputtering yields for physics and/or applied problems. The computational methods for calculating...

Earlier books on this subject, i.e. "Sputtering by Particle Bombardment I - III" are nearly 20 years old. Since then a lot of new and important work has been performed and published in international journals. The book gives an overview on all the new results. This concerns especially a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields. This is especially useful for all researchers who need sputtering yields for physics and/or applied problems. The computational methods for calculating...