Modern Vacuum Physics presents the principles and practices of vacuum science and technology along with a number of applications in research and industrial production. The first half of the book builds a foundation in gases and vapors under rarefied conditions, The second half presents examples of the analysis of representative systems and describes some of the exciting developments in which vacuum plays an important role. The final chapter addresses practical matters, such as materials, components, and leak detection. Throughout the book, the author's explanations are presented in...

An introductory text on how to use vacuum techniques. It provides a grounding in the basic scientific principles and concepts which underlie the production and measurement of vacua. This edition includes more worked examples, more information on basic gas properties, and an expanded approach to changed needs in vacuum applications in semiconductor processing.