This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

This book discusses the processing and properties of silicene, including the historical and theoretical background of silicene, theoretical predictions, the synthesis and experimental properties of silicene and the potential applications and further developments.