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Imaging epitaxially grown magnetic materials, e.g. magnetic oxides at high spatial resolution is of great interest both fundamentally as well as technologically. Currently, however, studies have been limited mainly to samples that can be fabricated on amorphous silicon nitride membranes. We have designed and built a jet-etcher, which is used to backside-thin epitaxially grown magnetic samples and have also developed several specific sample fabrication and etching procedures. The prepared samples have been measured using the high-resolution magnetic soft x-ray microscopy beamline 6.1.2 at the...

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