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What I want to talk about is the problem of manipulating and controlling things on a small scale stated Richard P. Feynman at the beginning of his visionary talk Theres Plenty of Room at the Bottom, given on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology. Today, almost half a century after this first insight into unlimited opportunities on the nanoscale level, we still want and have to talk about the same issue. The problem identified by Feynmann turned out to be a very difficult one due to a lack of understanding of the...

Die Mikrorobotik als Bestandteil der Mikrosystemtechnik hat in letzter Zeit grosse Auf merksamkeit auf sich gezogen und wird als eine der Schlusseltechnologien mit grossem Anwendungspotential betrachtet. Trotz des wachsenden Interesses findet man aber kaum ein Buch, in dem gleichermassen alle wichtige Bestandteile dieser fortgeschrittenen, breit gefacherten Technologie behandelt worden waren. Das vorliegende Buch ist ein Versuch, diese Lucke zu schliessen und zum ersten Mal eine systematisierte Gesamtsicht auf die Mikroroboter- und Mikromontageproblematik zu gewinnen. Auf die wichtigsten...

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development...

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development...