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The deposition of thin films on to a solid substrate has become an important materials processing technique and is of interest in many applications such as those involved with the fabrication of micro-electronic circuits, optical and magnetic devices, etc. Thin films are generally deposited by the process of Chemical Vapor Deposition (CVD).This work is directed at the simulation and optimization of the CVD process in a vertical impinging CVD reactor for material fabrication, focusing on the rate of deposition and on the uniformity of the thin film obtained.
This work considers the deposition...

This computational study investigates the use of response surfaces to model the output of the real life processes. In real life, the experimenter does not know the exact nature of the output of the process. So the output has to be approximated using a model. This work proposes the generation of a new response surface, Compromise Response Surface (CRS). The experimenter initially decides on all the possible models to be considered and the number of design points to be considered per model. Then the design is generated such that they are equally good for all the models considered. This design...