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MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS...

This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional...

This book is written to provide a brief introduction about nanoscience and technology in various aspects. In particular, Author has emphasized on carbon materials (i.e., fullerenes, carbon nanotubes along with their unique properties and potential application in different areas of every day life), and devices that make use of nanotechnology. In addition, Attention has been drawn towards various microscopes used in nanotechnology. I hope this book will be useful for undergraduate and post-graduate students who are interested to venture into the field of nanotechnology.