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In writing this book, our goal was to produce a much needed teaching and reference text with a fresh approach to c1eanroom technology. The most obvious technological reason for bringing this book into being is that c1ean- rooms have become vital to the manufacture and development of high- technology products in both the commercial and military sectors, and there- fore people have to develop an understanding of them. Examples of c1ean- room applications include the manufacture of integrated circuits and other electronic components, preciSion mechanical assemblies, computer disks and drives,...

This is a guide to the history, principles, manufacture, and applications of integrated circuits (ICs). It covers the elementary physics of semiconductors, and addresses practical issues crucial to the industry, including IC production techniques and facilities, processing, testing and packaging of chips, and reliability problems. Non-mathematical descriptions of complex topics such as silicon ICs can be easily understood by non-specialists.