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This book presents a systematic overview on the development philosophy for elementary semiconductor devices viz. MOS (Metal Oxide Semiconductor) capacitors & Schottky diodes. Thin films form an integral part of any semiconductor device developed till date. Thermally grown oxide films were characterized for thickness evaluation as well as for studying their Current-Voltage behavior for extraction of Breakdown Voltage & Breakdown Field (>1 MV/cm). Fabrication process for MOS devices was formulated for achieving high dielectric strength oxide films. Characterization (Capacitance-Voltage) of MOS...

The work presented in this book gives a glimpse into the various stages involved in the development of a Silicon Drift Detector (SDD) with on-chip JFET. The development of the SDD was carried out in phased manner, with the proto-type development being carried out at the Indian Institute of Technology-Bombay (IIT-B) followed by development of commercial grade SDDs at Bharat Electronics Ltd., Bangalore (BEL). Simulations in TCAD (device and process) were employed to arrive at optimized parameter values for the SDD with on-chip JFET. Various different kinds of SDDs and JFETs were designed to...