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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

This book provides an introduction to the state-of-the art in C-MEMS/C-NEMS with an emphasis on lithographically patterned photo-polymers, carbonized in an inert atmosphere. We can expand our perspective considerably by learning from the traditional carbon manufacturing community where researchers deal with a much wider variety of carbon feed stocks such as coal, coconut shell, wood, agricultural wastes, and industrial wastes to make all types of useful carbons. The new concepts are introduced by discussing carbon nanomaterials synthesis aided with catalysts and chemistry and detailing the...

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples,...

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with...

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and...

Nuclear Magnetic Resonance (NMR) and Electron Spin Resonance (ESR) spectroscopies are well-known characterization techniques that reveal the molecular details of a sample non-invasively. The authors discuss how NMR can provide useful information on the microstructure of carbon and its surface properties and explain how C-MEMS/C-NEMS technology can be explored for building improved NMR microdevices.

The authors highlight the manipulation of fluids and particles by dielectrophoresis and the use of carbon electrodes for dielectrophoresis in Lab-on-a-Chip. The use of these electrodes in...