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Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization,...

Climate change is a significant threat to humanity's future. Culturally, politically, economically, and personally, however, we are all deeply embedded in a system that continues to send us on a collision course that leads directly toward this threat. At this point, climate change is inevitable. What we must do now is to find ways to prepare and do all we can to slow our race to disaster. This means that a transition to a lower-carbon economy is unavoidable.

Biochemical research is vitally necessary for the transition we must make, and it will be an essential component of...

The twenty-first century world faces several enormous challenges: how to mitigate climate change, meet a growing energy demand without relying on fossil fuels, and manage the escalating quantities of solid waste generated by cities around the world. This compendium volume offers a viable solution to all three: using solid waste as a renewable resource.

Intended for a wide audience ranging from engineers and academics to decision-makers in both the public and private sectors, this volume has gathered together research into a range of technologies and methodologies. The editors, two...