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This book discusses the use of AES and SAM for the characterization of a wide range of technological materials. These include metals and alloys, semiconductors, nanostructures, and insulators. Its value as a tool for high-resolution elemental imaging and compositional depth profiling is illustrated. The application of the technique for obtaining compositional information from the surfaces, interfaces, and thin film structures of technological and engineering materials is demonstrated.

This volume also describes the basic physical principles of AES in simple, largely qualitative,...