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This book is an in-depth review of the electrochemistry of semiconductors and electronic devices. For in the relentless pursuit of faster, more compact devices the limits of materials science are probed, setting ever higher goals for semiconductor purity, crystal uniformity and circuit density. This book reviews and describes possible electrochemical avenues toward each of these goals.

Although supercritial fluid (SCF) technology is now widely used in extraction and purification processes (in the petrochemical, food and pharmaceuticals industries), this book is the first to address the new application of cleaning. The objective is to provide a roadmap for readers who want to know whether SCF technology can meet their own processing and cleaning needs. It is particularly helpful to those striving to balance the requirements for a clean product and a clean environment. The interdisciplinary subject matter will appeal to scientists and engineers in all specialties ranging from...