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A Unified Summary of the Models and Optimization Methods Used in Computational Lithography

Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction...

The late 1980s, revolutionary advances in digital halftoning enabled inkjet printers to achieve much higher image fidelity. The rapid rate of progress has resulted in numerous breakthroughs scattered throughout the literature, rendering old technologies obsolete and renewing the need for a centralized source on the current state of the art. Entirely revised and updated, Modern Digital Halftoning, Second Edition provides an integrated and up-to-date treatment of stochastic halftoning and digital printing.

Using full-color illustrations to enhance the text, this edition incorporates...