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More than 1,100 TEM images illustrate the science of ULSI

The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.

The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor...

This book constitutes the thoroughly refereed proceedings of the 2011 ICSOC Workshops consisting of 5 scientific satellite events, organized in 4 tracks: workshop track (WESOA 2011; NFPSLAM-SOC 2011), PhD symposium track, demonstration track, and industry track; held in conjunction with the 2011 International Conference on Service-Oriented Computing (ICSOC), in Paphos, Greece, December 2011. The 39 revised papers presented together with 2 introductory descriptions address topics such as software engineering services; the management of service level agreements; Web services and service...