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This descriptive textbook provides a clear look at the theories and process technologies necessary for understanding the modern power semiconductor devices, i.e. from the fundamentals of p-n junction electrostatics, unipolar MOSFET and superjunction structures, bipolar IGBT, to the most recent wide bandgap SiC and GaN devices. It also covers their associated semiconductor process technologies. Real examples based on actual fabricated devices, with the process steps described in clear detail are especially useful. This book is suitable for university courses on power semiconductor or power...

Looks at the theories and process technologies that are necessary for understanding power semiconductor devices. This title covers the fundamentals of junction electrostatics, p-n junction devices, unipolar MOSFET, bipolar IGBT, superjunction devices, and their associated silicon wafer process technology.