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The twentieth century ended with the vision of smart dust: a network of wirelessly connected devices whose size would match that of a dust particle, each one a se- containedpackageequippedwithsensing, computation, communication, andpower. Smart dust held the promise to bridge the physical and digital worlds in the most unobtrusive manner, blending together realms that were previously considered well separated. Applications involved scattering hundreds, or even thousands, of smart dust devices to monitor various environmental quantities in scenarios ranging from habitat monitoring to disaster...

In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective.The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such...

The twentieth century ended with the vision of smart dust: a network of wirelessly connected devices whose size would match that of a dust particle, each one a se- containedpackageequippedwithsensing, computation, communication, andpower. Smart dust held the promise to bridge the physical and digital worlds in the most unobtrusive manner, blending together realms that were previously considered well separated. Applications involved scattering hundreds, or even thousands, of smart dust devices to monitor various environmental quantities in scenarios ranging from habitat monitoring to disaster...