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The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems.
Following a general overview of the field, the first section of the book is organized by...

In this upper-level text, Professor Tanner introduces the reader to the behavior of electrons in solids, starting with the simplest possible model. Unlike other solid state physics texts, this book does not begin with complex crystallography, but instead builds up from the simplest possible model of a free electron in a box and introduces higher levels of complexity only when the simple model is inadequate. The approach is to introduce the subject through its historical development, and to show how quantum mechanics is necessary for an understanding of the properties of electrons in solids....

In this upper-level text, Professor Tanner introduces the reader to the behavior of electrons in solids, starting with the simplest possible model. Unlike other solid state physics texts, this book does not begin with complex crystallography, but instead builds up from the simplest possible model of a free electron in a box and introduces higher levels of complexity only when the simple model is inadequate. The approach is to introduce the subject through its historical development, and to show how quantum mechanics is necessary for an understanding of the properties of electrons in solids....