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Current challenges in the domain on selective and highly sensitive sensors include design, development and characterization of low detection limit sensors, development of low-noise readout methods, positive identification of analytes and, identification and reduction of the effect of various noise sources - both intrinsic and extrinsic to the sensor. The design, fabrication, characterization and testing of a piezoresistive microcantilever array (PuCA) is presented. A novel aspect of the sensors developed is the use of n-type doping which increases the sensitivity of the device by one order of...

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy...