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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
The book represents a concentration of a substantial amount of...

Early in 1989, while most of us were gathered in the Mediterranean five-centuries-old city of Alacant, the idea of a school on stopping and particle penetration phenomena came to our minds. Later that year when discussing this plan with some of the participants in the 13th International Conference on Atomic Collisions in Solids in Aarhus, we were pleased to note that the proposal was warmly welcomed indeed by the community. An Advanced Study Institute on this or a related subject had not been organized in the last decade. Because of the progress made particularly in the interaction of high...