Plasma Technology: Fundamentals and Applications

ISBN-13: 9781461365020 / Angielski / Miękka / 2012 / 224 str.

M. Capitelli; C. Gorse

Opis

The present book contains the proceedings of the workshop "Plasma Technology and Applications" which was held at 11 Ciocco (Lucca-Italy) during 5-6 July 1991. The workshop was organized just before ICPIG XX to emphasize the role of plasma physics and plasma chemistry in different fields of technology. Topics cover different applications such as lamps, plasma treatment of materials (etching, deposition, nitriding), plasma sources (microwave excitation, negative ion sources) and plasma destruction of pollutants. Several chapters deal with basic concepts in plasma physics, non- equilibrium plasma modeling and plasma diagnostics as well as with laser interaction with solid targets. The authors gratefully acknowledge the financial support provided by university of Bari (Italy) and by CNR (Centro di Studio per la Chimica dei Plasmi, Istituto di Fisica Atomica e Molecolare (IFAM) and Progetto Finalizzato Materiali Speciali per Tecnologie Avanzate) as well as the sponsorship of ENEA. M. Capitelli C. Gorse v CONTENTS Plasmas in nature, laboratory and technology 1 A. M. Ignatov and A. A. Rukhadze Laser diagnostics of plasmas 11 L. Pyatnitsky Probe diagnostics of plasmas 27 G. Dilecce Theory, properties and applications of non- equilibrium plasmas created by external energy sources 45 E. Son Non-Equilibrium plasma modeling 59 M. Capitel1i, R. Celiberto, G. Capriati, C. Gorse and S. Longo Gas discharge lamps 81 M. Koedam Plasma etching processes and diagnostics 93 R. d'Agostino and F. Fracassi Plasma deposition: processes and diagnostics 109 A.

Spis treści

Plasmas in Nature, Laboratory, and Technology (A. Ignatov, A.A. Rukhadze). Laser Diagnostics of Plasmas (L. Pyatnitsky). Probe Diagnostics of Plasmas (G. Dilecce). Theory, Properties, and Applications of Nonequilibrium Plasmas Created by External Energy Sources (E.E. Son). Nonequilibrium Plasma Modeling (M. Capitelli et al.). Gas Discharge Lamps (M. Koedam). Plasma Etching Processes and Diagnostics (R. d'Agostino, F. Fracassi). Plasma Deposition (A. Koch). Correlations between Active Plasma Species and Steel Surface Nitriding in Microwave Postdischarge Reactors (A. Ricard et al.). Simultaneous Removal of NOx SOx and Soot in Diesel Engine Exhaust by Plasma/Oil Dynamics Means (K. Fujii). DeNOx DeSOx Process by Gas Energization (L. Civitano, E. Sani). Microwave Excitation Technology (P. Leprince, J. Marec). Negative Ion Source Technology (H.J. Hopman, R.M.A. Heeren). Quasistationary Optical Discharges on Solid Targets (V.B. Fedorov). Index.