Models & Simulation of Deposition Processes with CVD Apparatus: Theory & Applications

ISBN-13: 9781606923252 / Angielski / Twarda / 2009 / 140 str.

Jürgen Ernst Geiser

Opis

Discusses mesoscopic models, which reflect the transport and reaction of the gaseous species through a homogeneous media in the chamber. This title presents the models that include the conservation of mass and the porous media that are in accordance with D