Mems Silicon Oscillating Accelerometers and Readout Circuits

ISBN-13: 9788770220453 / Angielski / Twarda / 2019 / 225 str.

Yong Ping Xu

Opis

The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Spis treści

• Preface
• 1. Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
• 2. Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers
• 3. MEMS Silicon Oscillating Accelerometer Readout Circuit
• 4. A MEMS Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter
• 5. A System-decomposition Model for MEMS Silicon Oscillating Accelerometer
• 6.Resonant Seismic Sensor
• Author Index
• Keyword Index

O autorze

Yong Ping Xu