Integration of Functional Oxides with Semiconductors

ISBN-13: 9781461493198 / Angielski / Twarda / 2014 / 278 str.

Alexander A. Demkov; Agham B. Posadas

Opis

This bookdescribes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing."

Spis treści

Introduction.- Critical issues in Oxide-Semiconductor Heteroepitaxy.- Predictive Engineering of Semiconductor-Oxide Interfaces.- Crystalline Functional Oxide Growth Methods.- Thin Oxide Film Characterization Methods.- Growing SrTiO₃ on Si (001) by Molecular Beam Epitaxy.- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates.- Other Epitaxial Oxides on Semiconductors.- Outlook and Parting Thoughts.- Appendices.

O autorze

Alexander Demkov received his Ph.D. in Physics at Arizona State University in 1995 secializing in electronic structure theory. His postdoctoral research was focused on electronic properties of zeolites. Het joined Motorola R&D in 1997, and has been working on materials problems of advanced CMOS gate stack, and quantum transport. He has authored over 60 papers, and has two issued patents. He has organized several national and international meetings, serves as an associate editor ofg the Journal of Vacuum Science and Technology, and is a member of the ITRS working group on Emerging Research Materials. He is adjunct professor of Physics at Arizona State University.

Blurb

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices.

This book also:

·         Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices

·         Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts

·         Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how it’s used