Chemistry and Lithography

ISBN-13: 9780819475626 / Angielski / Twarda / 2011 / 861 str.

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Opis

This text provides a concise treatment of the chemical phenomena in lithography. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age.