Resonance Frequency.- Quality Factor.- Responsivity.- Transduction.- Measurement and Noise.
Silvan Schmid is Associate Professor of Micro and Nanotechnology at the Technical University of Denmark. His research focus is in micro- and nanomechanical resonators for sensor applications and fundamental research.
Guillermo Villanueva is Professor at Ecole Polytechnique Federale de Lausanne (EPFL). His fields of expertise are MEMS/NEMS, sensors, oscillators, nonlinear and coupled dynamics, and fundamental noise processes.
Michael Lee Roukes is Robert M. Abbey Professor of
Physics, Applied Physics, and Biological Engineering at California Institute of
Technology. He was founding Director of Caltech’s Kavli Nanoscience Institute
from 2003-2006, and Co-Director from 2008-2013.
This authoritative book introduces and
summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic
formulas to model the devices. The authors cover the electrical and mechanical
aspects of nano electromechanical system (NEMS) devices. The introduced
mechanical models are also key to the understanding and optimization of
nanomechanical resonators used e.g. in optomechanics.
Five comprehensive chapters address:
The eigenmodes derived for the most common
continuum mechanical structures used as nanomechanical resonators;
The main sources of energy loss in
nanomechanical resonators;
The responsiveness of micro and nanomechanical resonators
to mass, forces, and temperature;
The most common underlying physical transduction
mechanisms;
The measurement basics, including amplitude and
frequency noise.
The applied approach found in this book is
appropriate for engineering students and researchers working with micro and
nanomechanical resonators.