Nano-optical devices are gaining rapid finding applications in many areas, from sensors to biomolecular devices based on thin films. The precise atomic scale film thickness control and uniformity is a backbone for maintaining propagating optical modes through the waveguide nanostructures fabricated by lithography. Lithography is the key technology that has driven the dynamic growth in the microelectronics and nanophotonics industries over the past three decades. Lithography together with Atomic Layer Deposition (ALD) is a powerful tool for the size reduction of accurately fabricated...