This project presents the design, simulation, and fabrication of a novel MEMS capacitive thin film pressure sensor for accurate and efficient pressure measurements. The proposed sensor utilizes a flexible diaphragm structure, fabricated using advanced thin film deposition techniques, to ensure high sensitivity and wide dynamic range. The capacitive sensing principle, coupled with advanced signal processing techniques, enables precise detection of pressure variations. The sensor's design incorporates a unique diaphragm geometry and electrode arrangement to optimize sensitivity and minimize...

The work presents the design and implementation of a micro-electromechanical system (MEMS) optical switch integrated with a piezoelectric energy harvester. The proposed device addresses the growing demand for sustainable and autonomous micro/nanosystems by harnessing ambient mechanical vibrations to generate electrical energy, thereby eliminating the need for external power sources. The core component of the system is a piezoelectric cantilever beam that converts mechanical vibrations into electrical energy through the direct piezoelectric effect. This harvested energy is utilized to actuate...