This Book presents a work on improving the performance of micro thermoelectric generator (µTEG) for solar energy conversion applications and also developing a highly reliable bridge type design. The performance is improved by optimizing the material parameters for the operating temperature and also by optimizing the design of the µTEG. Optimization of material is done based on the figure of merit of the material. Also the suitability of the material for MEMS fabrication and user friendliness of the material are considered for the selection of material. Perovskite type CaMn0.98 Nb0.02 O3 is...