Victor A. Perevostchikov, Vladimir D. Skoupov, Victor Gloumov
Gettering Defects in Semiconductors fulfills three basic purposes:
- to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;
- to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;
- to fill a gap in the contemporary literature on the underlying semiconductor-material theory.
The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international...
Gettering Defects in Semiconductors fulfills three basic purposes:
- to systematize the experience and research in exploiting various gettering ...
Victor A. Perevostchikov, Vladimir D. Skoupov, Victor Gloumov
Gettering Defects in Semiconductors fulfills three basic purposes:
- to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;
- to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;
- to fill a gap in the contemporary literature on the underlying semiconductor-material theory.
The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international...
Gettering Defects in Semiconductors fulfills three basic purposes:
- to systematize the experience and research in exploiting various gettering ...