Precision measuring instruments with nanometer resolution are almost always susceptible to disturbance transmitted mainly from ground vibration as well as other sources such as acoustic noise and direct mechanical vibrations. Even though the instrument itself is designed to handle such disturbances, researchers in this field are still in need of a smart way to properly eliminate this problem so that they can make their measurement results more trustworthy. In this book the proposed solution is to use a hybrid active-passive vibration isolation system between the instrument and ground to...