Micro Electro Mechanical Systems (MEMS) are popular alternatives to complex electronic circuits in RF systems due to their better performance, ease of fabrication and reliability. Many of these devices operate in their resonant mode and hence are limited by a fixed work frequency.
This book presents parametrically excited MEMS oscillators whose working frequency can be varied by an external pilot signal, using frequency locking or entrainment phenomenon. A nonlinear dynamic model is presented, which is verified by numerical simulations. Details of the model are studied analytically using...