"The book covers extensive and systematic measurement study of the MEMS switches that includes mechanical, electrical, transient, linearity, power handling, temperature stability, loss and reliability. Study of switch reliability is one of the critical features in this book"--

This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted...