This book presents the design, fabrication and measurements of stress tolerant RF MEMS switches with high power handling and reliability. RF MEMS switched capacitors are developed that are capable of handling >10 W of RF power under hot switching conditions. SPST (single-pole single-throw) and SP4T (single-pole four-throw) RF MEMS metal-contact switches with high power handling and reliability have also been developed. The design is based on circular cantilevers that are anchored at the center and are attached together using a radial arc. This provides a compact SPST switch with multiple...