The work focuses on the investigation of single Co-implanted ZnO nanowires using X-ray fluorescence (XRF), X-ray absorption spectroscopy (XAS), and X-ray diffraction (XRD) techniques with a nanometer resolution. The ZnO nanowires (NWs) were grown on Si substrates using VLS mechanism. The synthesized ZnO NWs were doped with Co via an ion implantation process. For the first time, the combined use of these techniques allows us to study the dopant homogeneity, composition, short- and large-range structural order of single NWs. The nano-XRF results indicate the successful and homogeneous Co doping...