This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradigm receives dedicated attention within a particular part of the text.

Readers are shown how to design, validate and apply a variety of new control approaches in micromanipulation: hysteresis modelling, discrete-time sliding-mode control and model-reference adaptive control. Experimental...