Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications.

This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data obtained. It also will serve as a reference for those who need to provide...