This is an all-inclusive book on microelectromechanical systems (MEMS). The developments of MEMS and devices have been influential in the demonstration of new devices and techniques, and even in the influx of new fields of research and developments such as BioMEMS, actuators, microfluidic devices, RF and optical MEMS. Therefore, the need is for MEMS book which incorporates the recent advances in the field. This book is prepared by the specialists in the field of MEMS. It consists of two major sections dedicated to RF and Optical MEMS, and MEMS based Actuators.

This book presents a concise summary of the widespread aspects of various fundamentals and applications of micro mechatronics. The technique of nano mechatronics has widespread applications across multiple spheres like sensors, automobiles and machinery. Its present day utilization has extended to aerospace equipment, biomedical apparatus, water engineering and other such emerging fields. Essentially, the technology for miniaturization is critical for achieving high performance and low consumption of resources, giving rise to small space instrumentation. This book presents a summary on the...

This book is prepared by the specialists in the field of microelectromechanical systems (MEMS). It consists of two major sections dedicated to BioMEMS Devices, and MEMS characterization and micromachining. The developments of MEMS and devices have been influential in the demonstration of new devices and techniques, and even in the influx of new fields of research and development such as BioMEMS, actuators, microfluidic devices, RF and optical MEMS. The experience signifies a need for MEMS book encompassing these materials along with the most important process steps in bulk micro-machining and...

This book is a collection of researches by various experts who share their analysis of current trends and future implications of micro-nano electrochemical systems. MEMS technology is progressively influencing and improving our quality of life. Simultaneously, progress in nanotechnology and nanomaterials has accelerated the growth of NEMS. This book consists of an analysis of modern technologies and their forthcoming developments. It focuses on the recent progress in devices and production procedures in the field of these miniaturized electromechanical structures. This book presents...