Master's Thesis from the year 2014 in the subject Electrotechnology, grade: 2, Vienna University of Technology (Institute for Automation & Control), course: Master in Automation - Electrical Enginnering, language: English, abstract: Sensors can be used to measure the position of an object. In the present thesis the effects which limit the usage of sensors in high dynamic positioning applications on a nanometer level are discussed. Various sensor principles and their properties are investigated and compared. Sensors based on the measurement of i.a. magnetic fields, illumination, or even strain...