This thesis describes novel approaches and implementation of high-resolution microscopy in the extreme ultraviolet light regime. Using coherent ultrafast laser-generated short wavelength radiation for illuminating samples allows imaging beyond the resolution of visible-light microscopes. Michael Zurch gives a comprehensive overview of the fundamentals and techniques involved, starting from the laser-based frequency conversion scheme and its technical implementation as well as general considerations of diffraction-based imaging at nanoscopic spatial resolution. Experiments on digital in-line...

This thesis describes novel approaches and implementation of high-resolution microscopy in the extreme ultraviolet light regime. Using coherent ultrafast laser-generated short wavelength radiation for illuminating samples allows imaging beyond the resolution of visible-light microscopes. Michael Zurch gives a comprehensive overview of the fundamentals and techniques involved, starting from the laser-based frequency conversion scheme and its technical implementation as well as general considerations of diffraction-based imaging at nanoscopic spatial resolution. Experiments on digital in-line...