Cluster Ion-Solid Interactions: Theory, Simulation, and Experiment provides an overview of various concepts in cluster physics and related topics in physics, including the fundamentals and tools underlying novel cluster ion beam technology. The material is based on the author s highly regarded courses at Kyoto University, Purdue University, the Moscow Institute of Physics and Technology, and the Moscow Engineering Physics Institute as well as his research results on cluster ion beam applications at Kyoto University.

The author introduces the basic principles...

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing.

Written by the originator of the gas cluster ion beam (GCIB) concept, this book:

• Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs
• Explores the development of sources for producing cluster beams from solid materials
• Describes the engineering...