This book presented a hierarchical MEMS design synthesis and optimization process developed for a specific structure of accelerometer. The design synthesis methodology exploits the fast and accurate simulation of the SUGAR tool (based on modified modal analysis) along with the full simulation capability of ANSYS (based on the finite element method). During the course of design, the modified nodal analysis and the finite element methods were combined in optimizing the sensor structure. After fabrication process, the utilizing of Allan variance method is also very useful to determine errors...