With the recent progress of MEMS technology, the development of MEMS devices for radio frequency (RF) applications has been growing rapidly. RF MEMS devices have a broad range of potential applications in wireless communication, space, instrumentation, etc. The main failure analysis issue for RF MEMS metal contacting switches focuses on contact metallurgy. During passage of current through the switch contact, some portions of the interface may melt and weld due to high temperature and a molten metal might be splashed from the surfaces, which leads to device failure. In this study, a...