Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic...

Adaptive Optics for Biological Imaging brings together groundbreaking research on the use of adaptive optics for biological imaging. The book builds on prior work in astronomy and vision science. Featuring contributions by leaders in this emerging field, it takes an interdisciplinary approach that makes the subject accessible to nonspecialists who want to use adaptive optics techniques in their own work in biology and bioengineering.

Organized into three parts, the book covers principles, methods, and applications of adaptive optics for biological imaging, providing...