Current challenges in the domain on selective and highly sensitive sensors include design, development and characterization of low detection limit sensors, development of low-noise readout methods, positive identification of analytes and, identification and reduction of the effect of various noise sources - both intrinsic and extrinsic to the sensor. The design, fabrication, characterization and testing of a piezoresistive microcantilever array (PuCA) is presented. A novel aspect of the sensors developed is the use of n-type doping which increases the sensitivity of the device by one order of...
Current challenges in the domain on selective and highly sensitive sensors include design, development and characterization of low detection limit sen...
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy...
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization stu...