The selection and preliminary treatment of suitable materials strongly influences the finishing quality due to extremely high standards demanded in ultraprecision machining. Through the selection of suitable cutting parameters, depending upon the material's properties appropriate finishing techniques for the tooling of ultraprecision components can be applied. In this area, necessary influence factors of finishing techniques with geometrically defined and undefined cutting edges are dealt with to realize the conditions demanded. In order to fulfill them, ultraprecision machining requires...