High performance, micro-g resolution, small size, low cost, low power accelerometers are needed in many applications such as inertial navigation, Unmanned Aerial Vehicles (UAVs), and GPS augmentation. Several sensing methods have been used, including piezoresistive/electric, resonant, tunneling, and capacitive techniques. Capacitive sensing has several advantages in terms of high sensitivity, stable DC-characteristics, low power dissipation, low temperature sensitivity, and low noise floor. This research work demonstrates full functionality of high- sensitivity, low-noise capacitive...