With the miniaturization of products to the levels of
micrometers and the recent developments in
microsystem fabrication technologies, there arises a
great need for an assembly process for the formation
of complex hybrid microsystems. Integration of
microcomponents, manufactured from different
materials using different micro fabrication
techniques, is still a primary challenge since some
of the fundamental problems originating from the
small size of parts to be manipulated, high precision
necessity and the physics of the micro world are
still not fully investigated. In this book,...